Study of the nanoindentation induced defects in nanocomposite n-TiC/a-C:H films
| Authors | |
|---|---|
| Year of publication | 2014 |
| Type | Article in Proceedings |
| Conference | Local Mechanical Properties X , Key Engineering Materials |
| MU Faculty or unit | |
| Citation | |
| web | http://www.scientific.net |
| Doi | https://doi.org/10.4028/www.scientific.net/KEM.606.159 |
| Field | Plasma physics |
| Keywords | nanocomposite; PVD; mechanical properties; indentation induced defects; TEM; FIB |
| Description | The aim of the present work is to study the thermal resistance of nanocomposite n-TiC/a-C:H coatings. Furthermore, the resistance of the coatings against indentation induced defect creation was studied using TEM analysis of lamellas prepared on a dual-beam microscope using a focused ion beam for both as-deposited and annealed samples (500-700oC). |
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