Electric signals measured during plasma thin-film etching and their connection to the electron concentration and the properties of the treated surface

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Authors

DVOŘÁK Pavel ŽEMLIČKA Radek PŘIBYL Roman BURŠÍKOVÁ Vilma

Year of publication 2022
Type Article in Periodical
Magazine / Source Plasma Sources Science and Technology
MU Faculty or unit

Faculty of Science

Citation
Web https://doi.org/10.1088/1361-6595/ac4e23
Doi http://dx.doi.org/10.1088/1361-6595/ac4e23
Keywords High-frequency and RF discharges; Radio-frequency and microwave measurements
Description Electric characteristics of a discharge are usually changed when a thin film is deposited on or etched from a discharge electrode or a substrate. The electric characteristics include plasma potential, discharge voltage and discharge current, including higher harmonic frequencies of these quantities. This fact can be used for monitoring of various plasma processes, but the mechanism in which the thin film influences the electric characteristics of discharge has not been fully clarified. This work verifies on the example of etching of diamond-like carbon films that variations of electric discharge parameters are caused by variations of electron concentration, which is caused by a difference of the electron emission yield between the DLC film and its substrate.
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