Mechanical and optical properties of silicon oxide protective coatings prepared by PECVD

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Authors	ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma JANČA Jan
Year of publication	1997
Type	Article in Proceedings
Conference	Juniormat
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates