Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma

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Authors	ELIÁŠ Marek ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma JANČA Jan LORENC Michal
Year of publication	1999
Type	Article in Proceedings
Conference	Proceedings of 14th International Symposium on Plasma Chemistry
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Description	Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates