Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM
| Authors | |
|---|---|
| Year of publication | 2025 |
| Type | Article in Periodical |
| Magazine / Source | Surface and Coatings Technology |
| MU Faculty or unit | |
| Citation | |
| web | https://doi.org/10.1016/j.surfcoat.2025.132847 |
| Doi | https://doi.org/10.1016/j.surfcoat.2025.132847 |
| Keywords | Ar ion flux; HiPIMS; Ionisation measurement; IPVD; Magnetron sputtering; QCM |
| Description | This paper presents measurements of particle fluxes at the substrate during a HiPIMS discharge using a novel biasable quartz crystal microbalance system, enabling detection of Ti neutrals, Ti ions, and, for the first time, Ar ions. Two target geometries were compared at equal power density and peak current density, and two different power supplies were tested under nominally identical conditions to assess the role of generator design. The study shows that particle fluxes are strongly affected by target geometry, pressure, and generator type. The rectangular target produced higher and more variable fluxes than the circular one, while increasing pressure consistently reduced them. Differences between generators mainly influenced the balance between Ti neutrals and ions, whereas Ar ion fluxes remained similar. Overall, Ar ion fluxes were consistently dominant, exceeding Ti ion fluxes by about an order of magnitude. |
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