In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction

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Authors	ZHUANG Y. PIETSCH U. STANGL J. HOLÝ Václav DAROWSKI N. GRENZER J. ZERLAUTH S. SCHÄFFLER F. BAUER G.
Year of publication	2000
Type	Article in Periodical
Magazine / Source	Physica B
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
Description	In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
Related projects:	Physical properties of new materials and layered structures