Deposition of polymer films in rf discharge at atmospheric pressure

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Authors	BRABLEC Antonín SLAVÍČEK Pavel KAPIČKA Vratislav KLÍMA Miloš ELIÁŠ Marek ŠÍCHA Miloš SLAVINSKÁ D. TRCHOVÁ M. BIEDERMAN H.
Year of publication	2001
Type	Article in Proceedings
Conference	15th ISPC symposium proceedings, vol VI
MU Faculty or unit	Faculty of Informatics
Citation
Field	Plasma physics
Keywords	plasma; plasma pencil; discharge
Description	Deposition of polymer films in rf discharge at atmospheric pressure
Related projects:	Spectroscopic and optical diagnostics of rf-discharges burning at atmospheric pressure Elementary processes in plasma pencil at atmospheric pressure under different conditions Generation of chemically active species by electrical discharges in water