Study of mode transition in low pressure capacitive RF discharges in nitrogen

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Authors	ZAJÍČKOVÁ Lenka DVOŘÁK Pavel KUDRLE Vít ŠMÍD Radek
Year of publication	2002
Type	Article in Periodical
Magazine / Source	Czech. J. Phys.
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	RF discharge; mode transition; sheath
Attached files	124_1.pdf
Description	We have studied the mode transition in low pressure capacitive RF discharges in nitrogen
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates