Project of a clean room laboratory for silicon device technology at the Masaryk University

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Authors	MIKULÍK Petr
Year of publication	2004
Type	Article in Proceedings
Conference	Proceedings of International Conference Silicon-2004
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	clean room; silicon; chip
Description	The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University.
Related projects:	Physical properties of new materials and layered structures