Reakce (NPF2)3 v kapacitně vázaném plazmatu

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Title in English	Reaction of (NPF2)3 in capacitively coupled plasma
Authors	VORÁČ Zbyněk ALBERTI Milan URBANČÍK Petr JANČA Jan
Year of publication	2005
Type	Article in Periodical
Magazine / Source	ChemZi
MU Faculty or unit	Faculty of Science
Citation
Field	Inorganic chemistry
Keywords	Hexafluoro-cyclo-triphosphazene; polymerization; microwave plasma; mass spectrometry
Description	Reaction of (NPF2)3 in capacitively coupled plasma was studied. The polymer layers was studied by means LDI-TOF MS and two groups of fluorophosphazene oligomers were detected in protonised or hydrated form.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface