Electron impact ionization of hexamethyldisiloxane

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Authors	ZAJÍČKOVÁ Lenka JÁNSKÝ Jaroslav MATEJČÍK S. CINGEL M.
Year of publication	2003
Type	Article in Proceedings
Conference	WDS'03 Proceedings of contributed papers
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates