Experimental study of a pre-ionized high power pulsed magnetron discharge

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Authors	VAŠINA Petr MEŠKO Marcel IMBERT Jean-Christophe GANCIU Mihai BOISSE-LAPORTE Caroline DE POUCQUES Ludovic TOUZEAU Michel PAGNON Daniel BRETAGNE Jean
Year of publication	2007
Type	Article in Periodical
Magazine / Source	Plasma Sources Science and Technology
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	magnetron; sputtering; high power pulses
Description	The paper study high power impulse magnetron plasma by means of time reselved optical emision spectroscopy and electrical measurements.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface