Structure and properties of carbon thin film deposited using Thermionic Vacuum Arc (TVA) methode

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Authors	VLADOIU R. MUSA G. CIUPINA V. BURŠÍKOVÁ Vilma
Year of publication	2007
Type	Article in Proceedings
Conference	Absracts and full papers 18th ISPC
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	TVA;carbon;mechanical properties
Description	Structure and properties of carbon thin film deposited using Thermionic Vacuum Arc (TVA) methode
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