Higher harmonic frequencies measured in Capacitively Coupled Plasma

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Authors	DVOŘÁK Pavel MORAVEC Zdeněk
Year of publication	2008
Type	Article in Proceedings
Conference	2nd CESPC - Book of extended abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasma; higher harmonics
Description	Measurement of higher harmonic frequencies in low-pressure capacitive discharge and dependence of their amplitudes on the matching unit parameters.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface