Investigation of spokes in reactive Ar/N2 atmosphere using HiPIMS

Varování

Publikace nespadá pod Filozofickou fakultu, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.
Autoři

KLEIN Peter HNILICA Jaroslav ŠLAPANSKÁ Marta KROKER Michael VAŠINA Petr

Rok publikování 2022
Druh Konferenční abstrakty
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
Popis Plasma self-organisation into the ionisation zones called spokes rotating in ExB direction is highly researched, however, still not a fully understood phenomenon in the High Power Impulse Magnetron Sputtering (HiPIMS) community. This work presents novel observations of spokes in the Ar/N2 atmosphere where the content of N2 is varied. Spoke spectral emission pattern, rotation velocity, number of spokes and floating potential changes are investigated with respect to changes in N2 content. Clear distinctions between effects of reactive bulk plasma and compound surfaces on spoke appearance are described. Spectral analysis of the spoke structure connects the changes in spoke appearance to changes within the discharge, namely the role of electron energization through Ohmic heating and through sheath energisation of secondary electrons.
Související projekty:

Používáte starou verzi internetového prohlížeče. Doporučujeme aktualizovat Váš prohlížeč na nejnovější verzi.